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The Ohio State University

NanoSystems Laboratory

Photo Lab

Located in PRB 1163

Available Equipment:
  1. Ozone Cleaner
  2. Optical Microscope
  3. 60 Ton Press
  4. Spinner in Fume Hood
  5. Ultrasonic Cleaner
  6. Optical Magnifier for making Photo Masks
  7. Furnace - up to 300° C (No Fume Exhaust)

Available Processes:
  1. Photo Lithography
  2. E-beam Lithograpy
  3. Photo Developing