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The Ohio State University

NanoSystems Laboratory

Organic Clean Room

Located in PRB 2185

1,600 ft2 of class 10,000 clean room space optimized for chemistry of air sensitive organic materials.

The clean room features four interconnected glove boxes with nitrogen or argon atmosphere available. The glove boxes contain two thin film PVD chambers with the following two capabilities.
  1. The metal film deposition chamber is equipped with one e-beam, one sputter, and two thermal evaporation sources.
  2. The organic film deposition chamber is equipped with two OLED and two thermal evaporation sources.
Additional equipment available within the glove boxes
  1. Spin coater
  2. Vacuum oven
  3. Freezer storage
  4. Solar simulator
  5. Wiring station
  6. Test station for electrical measurements
The clean room also features a yellow room for substrate preparation, with a fume hood, an ultrasonic cleaner, a UV ozone cleaner, and an optical microscope.